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5mmX5mm Finger - gold electrode capacitor ceramic circuit biogas humidity sensor chip
1. Base material: alumina ceramics; External dimensions: 5mm*5mm.
2. Line width: 215μm, line spacing: 185μm. Cross fingers: 3 pairs (6 fingers).
3. Metal layer structure: Ti/Cu/Ni/Au, thickness: 0.1μm, 2μm, 1μm, 1μm.
4. Applicable temperature: from -50 ℃ to +350 ℃.
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